Room-Temperature Ozone Sensing Capability of IGZO-Decorated Amorphous Ga2O3 Films.,ACS Applied Materials & Interfaces

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Room-Temperature Ozone Sensing Capability of IGZO-Decorated Amorphous Ga2O3 Films.
ACS Applied Materials & Interfaces ( IF 8.3 ) Pub Date : 2020-02-06 , DOI: 10.1021/acsami.9b22400
Yanxin Sui _{1,

2} , Huili Liang _{1,

3} , Quansheng Chen _{1,

2} , Wenxing Huo ₁ , Xiaolong Du _{1,

2,

3} , Zengxia Mei _{1,

3}

Affiliation

In present work, we report a room-temperature ozone sensor using InGaZnO (IGZO)-decorated amorphous Ga2O3 (a-Ga2O3) thin films. The gas sensing tests demonstrate that the topmost IGZO modification can significantly promote the sensors' responsivity. Intriguingly, the sensing capability presents a first increasing and then decreasing tendency as the surface morphology of IGZO develops from dispersed particles to a continuous film. Finite difference time domain (FDTD) simulation results prove that IGZO nanoparticles can remarkably increase the surface density of photogenerated electrons, clearly manifesting a strong dependence on IGZO particle size and contributing to the boosted responsiveness. However, once IGZO particles coalesce into a thin film, the ozone sensor's responsivity starts to decrease even though the number of photogenerated carriers still increases. The smaller specific surface area of IGZO thin film is believed to be responsible for this phenomenon. The proposed ozone gas sensors own the merits of low cost, room-temperature detection, easy integration, and mass production, significantly expanding the application fields of a-Ga2O3 thin film.

中文翻译：

IGZO装饰的非晶Ga2O3薄膜的室温臭氧感测能力。

在目前的工作中，我们报告了一种使用InGaZnO（IGZO）装饰的非晶Ga2O3（a-Ga2O3）薄膜的室温臭氧传感器。气体传感测试表明，最顶部的IGZO改型可以显着提高传感器的响应能力。有趣的是，随着IGZO的表面形态从分散的颗粒发展为连续的膜，传感能力呈现出先增大后减小的趋势。时域有限差分（FDTD）仿真结果证明，IGZO纳米颗粒可以显着增加光生电子的表面密度，从而清楚地表明了对IGZO颗粒大小的强烈依赖性，并有助于提高响应速度。但是，一旦IGZO颗粒聚集成薄膜，臭氧传感器的即使光生载流子的数量仍然增加，响应度也开始下降。据信IGZO薄膜的较小的比表面积是造成这种现象的原因。所提出的臭氧气体传感器具有成本低，常温检测，易于集成和批量生产的优点，大大扩展了a-Ga2O3薄膜的应用领域。

更新日期：2020-02-06

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