Graded intrafillable architecture-based iontronic pressure sensor with ultra-broad-range high sensitivity.,Nature Communications

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Graded intrafillable architecture-based iontronic pressure sensor with ultra-broad-range high sensitivity.
Nature Communications ( IF 14.7 ) Pub Date : 2020-01-10 , DOI: 10.1038/s41467-019-14054-9
Ningning Bai ₁ , Liu Wang _{1,

2} , Qi Wang ₁ , Jue Deng _{1,

2} , Yan Wang ₁ , Peng Lu ₁ , Jun Huang ₁ , Gang Li ₁ , Yuan Zhang ₁ , Junlong Yang ₁ , Kewei Xie ₁ , Xuanhe Zhao ₂ , Chuan Fei Guo _{1,

3}

Affiliation

Sensitivity is a crucial parameter for flexible pressure sensors and electronic skins. While introducing microstructures (e.g., micro-pyramids) can effectively improve the sensitivity, it in turn leads to a limited pressure-response range due to the poor structural compressibility. Here, we report a strategy of engineering intrafillable microstructures that can significantly boost the sensitivity while simultaneously broadening the pressure responding range. Such intrafillable microstructures feature undercuts and grooves that accommodate deformed surface microstructures, effectively enhancing the structural compressibility and the pressure-response range. The intrafillable iontronic sensor exhibits an unprecedentedly high sensitivity (Smin > 220 kPa-1) over a broad pressure regime (0.08 Pa-360 kPa), and an ultrahigh pressure resolution (18 Pa or 0.0056%) over the full pressure range, together with remarkable mechanical stability. The intrafillable structure is a general design expected to be applied to other types of sensors to achieve a broader pressure-response range and a higher sensitivity.

中文翻译：

基于分级内部填充架构的离子电子压力传感器，具有超宽范围高灵敏度。

灵敏度是柔性压力传感器和电子皮肤的关键参数。虽然引入微结构（例如微金字塔）可以有效提高灵敏度，但由于结构可压缩性差，导致压力响应范围有限。在这里，我们报告了一种设计可内部填充微结构的策略，该策略可以显着提高灵敏度，同时扩大压力响应范围。这种可内部填充的微结构具有容纳变形表面微结构的底切和凹槽，有效增强了结构的可压缩性和压力响应范围。该内部填充式离子电子传感器在较宽的压力范围（0.08 Pa-360 kPa）内表现出前所未有的高灵敏度（Smin > 220 kPa-1），在整个压力范围内具有超高压分辨率（18 Pa或0.0056%），卓越的机械稳定性。内部填充结构是一种通用设计，有望应用于其他类型的传感器，以实现更宽的压力响应范围和更高的灵敏度。

更新日期：2020-01-10

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