| 收稿范围 |
Nanotechnology and Processing — Electronics, photonics, MEMS and Life Sciences
Affiliated with iMNEs
Microelectronic Engineering is the premier journal focused on the fabrication and characterization of micro/nano-electronic materials, devices and circuits (including novel electronic nanomaterials), as well as the understanding of their working mechanisms, performance, yield, variability, stability, and reliability. The journal also focuses on the techniques that make possible the fabrication and characterization of such devices and circuits, and on the materials involved in them. Occasionally, outstanding papers on simulation of materials properties, device figures-of-merit or compact modeling of circuits and systems may be accepted. The following topics are of special interest:
Devices
Photonic and optoelectronic devices (including, sensors, actuators, phototransistors)
Transistors (including ultra-scaled, thin film, organic, ferroelectric)
Resistive switching devices (memristors, RRAM, PCRAM, FeRAM, MRAM)
Magnetic and spintronic devices
MEMS and NEMS (including power, RF, magnetic, organic)
Flexible electronic devices (including wearable, printed, paper)
Devices for energy harvesting (piezoelectric, flexoelectric, photovoltaic, solar cells)
Bioelectronic devices (molecular detection, biomimetic, diagnosis)
Device-level simulations (including variability and reliability)
Materials
Wide bandgap semiconductors
Dielectrics (low K and high K)
Two-dimensional (2D) Materials and related transferring techniques
Nanotubes, nanowires, and other nanomaterials and nanostrctures for device fabrication
Interconnects, metallization and barrier materials
New Resist Materials
Silicon on insulators
Polymers and flexible substrates, including biocompatible materials
Atomistic simulations of materials properties
Fabrication and characterization processes
Thin films deposition techniques (CVD, ALD, evaporation, sputtering, MBE, plasma)
Lithography (including optical, EUV, electron beam, nanoimpring, particle-assisted, mask less, X-ray optical methods, emerging methods and limits, as well as resists)
Pattern transfer (including ion, plasma and wet transfer, as well as transfer of 2D materials)
Integration processes (including inkjet printing, 3D printing, 3D integration)
Top-down and bottom-up self-assembly processes
Annealing and its effect in the materials (including crystallization, wrinkling, de-wetting)
Nanometrology (TEM, SEM, EDX, EELS, STM, AFM and related setups)
Circuits and applications
Sensing and actuation, including bio-compatible applications
Signal souring and transfer
Logic operations and data processing
Electronic memories and information storage
Artificial neural networks and neuromorphic computing
Compact modeling of electronic circuits
Quantum computing
Five different types of articles are considered:
Research articles that report regular original research that produces significant advancement.
Accelerated Publications (Letters) that feature exciting research breakthroughs.
Review Articles that inform readers of the latest research and advances in a topic within the broad field of microelectronic engineering. This includes roadmaps and guides proposing the recommended methods in a specific field.
Short / Technical notes intended for original limited investigations or short description of original industrial or industrially-related research and development work
News and Opinions that comment on topical issues or express views on the developments in related fields, or comment on previously published work |
| 编辑信息 |
Editor-in-Chief Editor Special Issues Dr. Jin-Woo ChoiLouisiana State University, Baton Rouge, Louisiana, United StatesArea Editors University of Canterbury, 8140, Christchurch, New Zealand Email Dr. Maan AlkaisiNanolithography, 3D Nanoimprint, BioMEMs, Bionanotechnology, Surface texturing Dr. Joel M. BarnettTokyo Electron US Holdings Inc, Austin, Texas, , United States Email Dr. Joel M. BarnettCleaning/surface preparationNational Centre of Microelectronics, 08193, Bellaterra, Spain Email Professor Joan Bausells - Silicon-based micro/nanosystems and sensors.- Micro/nanoelectromechanical systems (MEMS/NEMS).- Integrated sensors, CMOS sensors.- Micro/nanoelectronics technology, nanofabrication. Professor Ahmed BusnainaNortheastern University Center for High-rate Nanomanufacturing, 467 Egan Bldg, Boston, Massachusetts, MA 02115, United States Email Professor Ahmed BusnainaDr. Yifang ChenFudan University School of Information Science and Engineering, 220 Han Dan Road, 200433, Shanghai, China Email Dr. Yifang Chen Electron beam lithography, nanoimprint, nanofabrication, nanoelectronics, nanophotonics, metasurface, photoelectronic devices, X-ray opticsDr. Vassilios ConstantoudisInstitute of Nanoscience and Nanotechnology, Aghia Paraskevi, 15310, Athens, GreeceEmail Dr. Vassilios Constantoudis Nanometrology and nanocharacterization, Scanning Probe Microscopies, Lithography and etching, Applications of Artificial Intelligence and Machine/Deep Learning techniques in Nanotechnology and NanoelectronicsDr. Uros CvelbarJozef Stefan Institute, 1000, Ljubljana, Slovenia Email Dr. Uros Cvelbar Plasma processing and material characterizationUniversity of Sherbrooke, Sherbrooke, J1K 2R1, Quebec, Canada Email Dr. Maxime Darnon Plasma etching, Microelectronics, Materials characterization Dr. Wim De MalscheVUB University, 1050, Brussel, Belgium Email Dr. Wim De Malsche Device development for microfluidics and microreactor applicationsEthniko Kentro Ereunas Physikon Epistemon 'Demokritos', 153 10, Athens, Greece Email Dr. Athanasios Dimoulas 2D materials (graphene, silicene, germanene, transition metal dichalcogenides); high k gate dielectrics and high mobility semiconductors (Ge, InGaAs) for advanced CMOS; Topological insulators (characterization by ARPES) Professor Huigao DuanHunan University College of Mechanical and Vehicle Engineering, College of Mechanical and Vehicle Engineering, Hunan University, 410082, Changsha, Hunan, China Email Professor Huigao Duan Nanofabrication, Nanopatterning, Nanolithography, Nanomanufacturing, Nanophotonics, Nanoplasmonics, Sensors, Smart Structures, Microsystems.Dr. Irene Fernandez-CuestaUniversity of Hamburg, 20148, Hamburg, Germany Email Dr. Irene Fernandez-CuestaNanoimprint lithography, Nanooptics, Plasmonics, Nanofluidics, (bio)sensors, Single molecule detection, Device fabricationProfessor Chien-Chong HongNational Tsing Hua University Department of Power Mechanical Engineering, No. 101, Section 2, Kuang-Fu Road, 30013, Hsinchu, Taiwan Email Professor Chien-Chong HongAcoustic biosensors, Point-of-care blood diagnostics, Single molecular nanopore sensing, Flexible electronicsThe University of Tokyo, 113-0033, Bunkyo-Ku, Tokyo, Japan Email Professor Beomjoon Kim Soft-lithography & nano fabrication, Bio-MEMS and DDS(drug delivery system), MEMS energy harvest, microneedle Pohang University of Science and Technology Department of Mechanical Engineering, 77 Cheongam-Ro, Nam-Gu, 37673, Pohang, South Korea Email Professor Dong Sung KimPolymer micro/nano-manufacturing, Cell/tissue culture platforms, Microfluidics, Organ-on-a-chip, Energy harvesting Professor Wu LUOhio State University Department of Electrical and Computer Engineering, 205 Dreese Labs; 2015 Neil Avenue, Columbus, Ohio, 43210, United States Email Professor Wu LUSemiconductor device physics, Wide Bandgap Semiconductors, High Electron Mobility Transistors, Bipolar transistors, Biosensors, Drug and gene delivery devicesDr. Mario LanzaInstitute of Functional Nano and Soft Materials, Suzhou, China Email Dr. Mario LanzaTwo-dimensional materials, Dielectric breakdown and resistive switching, Memristors for information storage and neuromorphics, Conductive atomic force microscopyDr. Jaejong LeeKorea Institute of Machinery and Materials Nano-Convergence Mechanical Systems Research Division, 156 Gajeongbuk-Ro, 305-343, Daejeon, Korea, Republic of Email Dr. Jaejong Lee Nanoimprint Lithography, Nanobiology devices and NanofabricationDr. Sangho LeeKorea Insitiute of Industrial Technology, Ansan-si, Republic of Korea Email Dr. Sangho Lee Printed Electronics, Lab-hip, Inkjet printing-based manufacturing processDr. Rodolphe MarieTechnical University of Denmark, Kogens Lyngby, Denmark Email Dr. Rodolphe MarieNanofluidics, microfluidics, fluorescence microscopy, lab-on-a-chip, single cellDr. Sunggook ParkLouisiana State University Department of Mechanical & Industrial Engineering, 2514B Patrick F. Taylor Hall, Baton Rouge, Louisiana, 70803, United States Email Dr. Sunggook Park Nanoimprint lithography/nanomolding; bioMEMS/NEMS; micro/nanoscale heat transferMicroelectronics Institute of Barcelona, E-08193, Cerdanyola del Valles, Spain Email Dr. Fransesc Pérez-Murano Advanced nanofabrication methods, Nanoelectromehcanical systems, Nanoelectronic devices and sensors Dr. Edward SongUniversity of New Hampshire, Department of Electrical and Computer Engineering, Durham, NH 03824, United States Email Dr. Edward Song Biosensors, Electrochemical sensors, Aptamer-based sensors, BioMEMS, Lab-on-a-Chip, Microfluidics, Point-of-care diagnostics, Wearable devicesProfessor Li TaoSoutheast University School of Materials Science and Engineering, Nanjing, China Email Professor Li Tao micro/nano fabrication, 2D materials and devices, microsystems, nanoengineering and micro/nano sensors.Dr. Guillermo VillanuevaEPFL Advanced NanoElectroMechanical Systems Laboratory, ME D2 2726 - Station 9, CH-1015, Lausanne, Switzerland Email Dr. Guillermo VillanuevaProf. Dr. Shaowei WangShanghai Institute of Technical Physics Chinese Academy of Sciences, 188 Xinlai Rd, Jiading Qu, 201815, Shanghai Shi, China Email Prof. Dr. Shaowei Wang Micro-nanophotonics devices and applications, integrated-cavities for micro-spectrometers, interaction between high-Q optical cavity and low-dimensional materials, nano laser, solar selective absorbers, metamaterial polarizers, and optical thin filmsProfessor Sheng-Joue YoungNational Formosa University, 632, Huwei, Taiwan Email Professor Sheng-Joue YoungNanotechnology, Optoelectronic devices, Flexible and nano devicesAdvisory Editors, Europe Professor Nuria BarniolAutonomous University of Barcelona, Barcelona, Spain Email Professor Nuria BarniolMicro and Nanoelectromechanical systems, CMOS-MEMS, RF MEMS, MEMS based sensors, MEMS/NEMS relaysMicrofluidic ChipShop GmbH, Jena, Germany Email Dr. Holger Becker Microfluidics, polymer microfabrication, commercialization of microsystems Institute for Integrated Sensor Systems, Wiener Neustadt, Austria Email Dr. Hubert BrücklMagnetoelectronics/spintronics, micro- und nanoscale lithography, functional nano-objects, biomolecular diagnostics University College Paris, Paris, France Email Dr. Yong Chen Micro and Nano fabrication, Biomedical Devices, Nanoimprint and Nanoprint Technologies Dr. Michel DespontCSEM Zurich, Zurich, Switzerland Email Dr. Michel Despont Micro and nano ElectroMechanical System - M(N)EMS, Nanopatterning, Scanning probe technologyDr. Zahid A. K. DurraniImperial College London, London, United Kingdom Email Dr. Zahid A. K. DurraniNanometer Devices for Electronics and Optoelectronics, Dimension-sensitive Device Properties, Mesoscopic Devices, Top-Down / Bottom-Up (Self-Assembly) Nanofabrication, Nanomaterials for Device FabricationFrench Alternative Energies and Atomic Energy Commission Electronics and Information Technology Laboratory, Grenoble, France Email Dr. Thomas Ernst Emerging thin film devices technologies, Nanoelectronics, CMOS, SOI, Memories, nanoelectromechanical systems (NEMS) Dr. Maria FarsariFoundation of Research and Technology Hellas Library, Irakleio, Greece Email Dr. Maria Farsari Multiphoton lithography, 3D printing, Laser fabricationInstitute for Microelectronics and Microsystems National Research Council, Catania, ItalyEmail Dr. Guglielmo Fortunato Flexible and large area electronics, Thin Film Transistors, organic electronics, Laser annealing Dr. Nikolaj GadegaardUniversity of Glasgow, Glasgow, Scotland, United Kingdom Email Dr. Nikolaj GadegaardMicro- and nanofabrication for biomedical appli, Nanoimprint and injection moulding replication technologies, Life science devicesUniversity College Cork National University of Ireland, Cork, Ireland Email Dr. Jim GreerAtomic scale simulations for nano, Advanced MOS devices, Organic and molecular electronics TU Delft, Delft, Netherlands Email Dr. Cornelis Wouter Hagen Focused electron beam induced processing (FEBIP), Charged particle optics, Electron-matter scattering simulations Dr. Mervyn E. JonesImperial College London, London, United Kingdom Email Dr. Mervyn E. Jones Electron beam lithography /machines/resists/ mask making, Lithography for novel optical and nano device fabricationProfessor Dieter KernEberhard Karls University Tübingen, Tubingen, Germany Email Professor Dieter KernNanofabrication, Charged Particle Optics and Applications, Nanoelectronics and -photonics, NanobiotechnologyUniversity of Catania, Catania, Italy Email Dr. Salvo Mirabella Low-cost nanostructures, Nanosensing, Third generation photovoltaics Dr. David PeyradeMicroelectronic Technology Laboratory, Grenoble, France Email Dr. David Peyrade • Micro and Nano Fabrication• Life science devices• Industrial transfertDr. Ivo RangelowIlmenau University of Technology, Ilmenau, Germany Email Dr. Ivo Rangelow Novel nanofabrication methods, Alternative lithography, Active scanning probes and technology,Nanodevices and nanosensors, Nanoelectromehcanical systemsPaul Scherrer Institute, Villigen, Switzerland Email Dr. Helmut Schift nanoimprint lithography, 3D lithography, LIGA technology TU Delft, Delft, Netherlands Email Prof. Dr. Urs Staufer Instrumentation and tools for nano science, Micro fabrication techniques, Scanning Probe Microscopy Uppsala University, Uppsala, Sweden Email Dr. Maria Tenje organs-on-chip, droplet microfluidics, lab-on-a-chip Advisory Editors, America Dr. Mohamed ChakerNational Institute of Scientific Research, Quebec, Quebec, Canada Email Dr. Mohamed Chaker Plasma processing : etching, nanotexturing and bonding, Nanomaterials and thin films for device fabrication, Laser-assisted processingDr. Panos DatskosOak Ridge National Laboratory, Oak Ridge, Tennessee, United States Email Dr. Panos Datskos MEMS/NEMS sensors, Microfabrication, Nanostructured materials (superhydrophobic)University of Houston, Houston, Texas, United States Email Professor Demetre Economou Plasma Science and Engineering, Plasma Nanotechnology, Plasma Modeling and Simulation, Experimental Diagnostics and Sensors Microplasmas University of Alberta, Edmonton, Alberta, Canada Email Dr. Stephane EvoyMicro/nanofabrication, micro/nanolithography, Micro/nanoelectromechanical systems, Biosensors, lab-on-a-chip, energy harvesting Dr. Gregg GallatinApplied Math Solutions LLC, Newtown, Connecticut, United States Email Dr. Gregg Gallatin Modeling, simulation and analysis of nanofabrication techniques, processes and materials, particularly microlithographyMr. John HartleyNuflare Technology America Inc, Sunnyvale, California, United States Email Mr. John Hartley Electron beam systems engineering, Nanoscale fabrication, Mask technologyDr. Patrick NaulleauE O Lawrence Berkeley National Laboratory, Berkeley, California, United States Email Dr. Patrick Naulleau EUV Lithography, EUV Metrology, Resist materials characterization and modelingProfessor Ian PapautskyUniversity of Illinois at Chicago, Chicago, Illinois, United States Email Professor Ian Papautsky microfluidic devices and systems, lab-on-a-chip, point-of-care biosensorsUniversity of California San Diego Department of Nanoengineering, San Diego, California, United States Email Professor Joseph Wang Sensors and Electrochemistry Advisory Editors, Asia-Oceania Dr. Hsuen-Li ChenNational Taiwan University, Taipei, Taiwan Email Dr. Hsuen-Li Chen Nanometer Devices for Optoelectronics, Nanomaterials for Device Fabricati, Nanoimprint LithographyDr. Toshiaki IwamatsuRenesas Electronics Corporation, Koto-Ku, Japan Email Dr. Toshiaki Iwamatsu CMOS Device and Process Technology, SOI CMOS TechnologyFudan University, Shanghai, China Email Dr. Ran Liu Nanometer devices for electronics and optoelectronics, Dielectrics (low K and high K), Nanoimprint lithography techniques and templates National University of Singapore, Singapore, Singapore Email Dr. Jeroen Van Kan Micro and Nano fabrication using Proton Beam Writing (PBW), Nano Imprint Lithograph (NIL) and mold fabrication, Micro & Nanofluidic lab on chip devices for single molecule detection and particle separation, Nanowire fabrication and integration Professor Dacheng WeiFudan University, Shanghai, China Email Professor Dacheng Wei Nanoelectronics, organic electronics, flexible electronics
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