Electron-Beam Evaporation (Angstron Engineering AMOD)

• Dual electron beams for co-evaporation: 2 Telemark 6 ╳ 7cc electron beam sources
• Reactive gas: O2, N2...
• Substrate size: 6 inches, temperature: <500 °C
• Metal: Al, Si, Ti, Cr, Fe, Co, Ni, Cu, Nb, Ag, Ta, W, Au...
• Non-metal: Al2O3, SiO2, TiO2, Fe2O3, NiO, Ga2O3, SrTiO3, ZrO2, Nb2O5, In2O3, SnO2, BaO, BaF2, Ta2O5, La2O3...