Resonant microcantilever arrays are developed for the purpose of label-free and real-time analyte monitoring and biomolecule detection. MEMS cantilevers made of electroplated nickel are functionalized with Hepatitis antibodies. Hepatitis A and C antigens at different concentrations are introduced in undiluted bovine serum. All preparation and measurement steps are carried out in the liquid within a specifically designed flowcell without ever drying the cantilevers throughout the experiment. Both actuation and sensing are done remotely and therefore the MEMS cantilevers have no electrical connections, allowing for easily disposable sensor chips. Actuation is achieved using an electromagnet and the interferometric optical sensing is achieved using laser illumination and embedded diffraction gratings at the tip of each cantilever. Resonant frequency of the cantilevers in dynamic motion is monitored using a self-sustaining closed-loop control circuit and a frequency counter. Specificity is demonstrated by detecting both Hepatitis A and Hepatitis C antigens and their negative controls. This is the first report of Hepatitis antigen detection by resonant cantilevers exposed to undiluted serum. A dynamic range in excess of 1000 and with a minimum detectable concentration limit of 0.1 ng/ml (1.66 pM) is achieved for both Hepatitis A and C. This result is comparable to labeled detection methods such as ELISA.

共振微悬臂阵列的开发是为了实现无标记的实时分析物监测和生物分子检测。电镀镍制成的MEMS悬臂采用肝炎抗体功能化。在未稀释的牛血清中引入不同浓度的甲型和丙型肝炎抗原。所有准备和测量步骤均在专门设计的流通池中在液体中进行，而在整个实验过程中都无需干燥悬臂。致动和感测均在远程完成，因此MEMS悬臂没有电气连接，从而可轻松丢弃传感器芯片。使用电磁体可实现致动，并且通过激光照明和每个悬臂尖端处的嵌入式衍射光栅可实现干涉式光学传感。悬臂在动态运动中的谐振频率通过一个自持的闭环控制电路和一个频率计数器进行监控。通过检测甲型肝炎和丙型肝炎抗原以及它们的阴性对照可以证明特异性。这是首次通过暴露于未稀释血清的共振悬臂进行肝炎抗原检测的报告。甲型和丙型肝炎的动态范围均超过1000，最低可检测浓度极限为0.1 ng / ml（1.66 pM）。该结果可与ELISA等标记检测方法相媲美。这是首次通过暴露于未稀释血清的共振悬臂进行肝炎抗原检测的报告。甲型和丙型肝炎的动态范围均超过1000，最低可检测浓度极限为0.1 ng / ml（1.66 pM）。该结果可与ELISA等标记检测方法相媲美。这是通过暴露于未稀释血清的共振悬臂来检测肝炎抗原的首次报道。甲型和丙型肝炎的动态范围均超过1000，最低可检测浓度极限为0.1 ng / ml（1.66 pM）。该结果可与ELISA等标记检测方法相媲美。