A joint theory–experimental study is presented of irregularly shaped nano-pores in amorphous silicon. STEM– ELLS spectra were measured for each pore. The observed helium $1s^2\to 1s2p$(¹P) excitation energies were found to be shifted from that of a free atom. The relation between the helium density in the pore and these energy shifts is explored and shown to be completely consistent with earlier studies of helium in its bulk condensed phases as well as encapsulated as bubbles in solid silicon. The density, pressure and depth of the pores, all key properties for applications, were determined. An alternative and novel method for determining the depth of the pores more accurately is presented.

中文翻译：

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关于非晶硅薄膜中充满氦气的纳米孔的特性


提出了非晶硅中形状不规则的纳米孔的联合理论-实验研究。STEM– 测量每个孔的 ELLS 光谱。发现观察到的氦 $1s^2\to 1s2p$（¹P） 激发能与自由原子的激发能不同。研究探讨了孔隙中的氦密度与这些能量转移之间的关系，并证明这与早期对本体凝聚相中的氦以及在固体硅中封装为气泡的氦的研究完全一致。确定了孔隙的密度、压力和深度，这些都是应用的关键特性。提出了一种更准确地确定孔隙深度的替代新方法。