This paper presents the results of spectroscopic measurements of plasma in a linear simulator of a plasma-beam installation (PBI) for conducting materials science research. For the first time, non-contact optical diagnostic methods were employed to measure the plasma parameters in the PBI. These measurements were allowed for the clarification of the PBI plasma parameters and the identification of transition zones in different operational modes. Analysis of the plasma emission spectrum enabled the identification of impurity spectral lines and the estimation of key plasma parameters under varying experimental conditions. The spectra were recorded using two optical spectrometers covering a wavelength range of 200–800 nm. The experimental conditions varied in terms of electron beam accelerating voltage (1–5 kV), working gas pressure (1–6 mTorr), and target bias voltage (from −500 to −100 V). The Boltzmann plot method and Stark broadening of the Balmer lines were used to estimate electron temperature and density. Based on the obtained spectroscopic data, the electron density and the electron temperature were determined. The methods described in this study are applicable to linear plasma devices.

中文翻译：

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等离子束装置的首次光谱研究


本文介绍了用于进行材料科学研究的等离子束装置 (PBI) 线性模拟器中等离子体光谱测量的结果。首次采用非接触式光学诊断方法测量PBI中的等离子体参数。这些测量可以澄清 PBI 等离子体参数并识别不同操作模式下的过渡区。对等离子体发射光谱的分析能够识别杂质谱线并估计不同实验条件下的关键等离子体参数。使用两台波长范围为 200-800 nm 的光学光谱仪记录光谱。实验条件在电子束加速电压（1-5 kV）、工作气压（1-6 mTorr）和目标偏置电压（-500 至-100 V）方面有所不同。玻尔兹曼图法和斯塔克巴尔默线展宽用于估计电子温度和密度。基于获得的光谱数据，确定电子密度和电子温度。本研究中描述的方法适用于线性等离子体装置。