二维有机半导体单晶的晶圆级外延生长用于高性能晶体管,Advanced Materials

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二维有机半导体单晶的晶圆级外延生长用于高性能晶体管
Advanced Materials ( IF 27.4 ) Pub Date : 2023-07-12 , DOI: 10.1002/adma.202301017
Jinwen Wang ₁ , Zheng Ren ₁ , Jing Pan ₁ , Xiaofeng Wu ₁ , Jiansheng Jie _{1,

2} , Xiaohong Zhang ₁ , Xiujuan Zhang ₁

Affiliation

最先进的电子学和光电子学的成功在很大程度上依赖于制造半导体单晶晶圆的能力。然而，由于缺乏晶格匹配的外延衬底和复杂的成核行为，传统的无机晶圆外延生长策略对于生长有机半导体单晶是无效的，严重阻碍了有机单晶电子学的进步。在此，首次开发了一种用于二维有机半导体单晶晶圆级生长的锚定晶种外延生长方法。晶种牢固地锚定在粘性液体表面，保证有机单晶从晶种稳定外延生长。原子级平坦的液面有效消除了基底缺陷的干扰，大大增强了有机晶体的二维生长。利用这种方法，形成了晶圆级的几层双（三乙基甲硅烷基）-蒽醌（Dif-TES-ADT）单晶，为有机场效应晶体管带来了突破，其迁移率高达8.6 cm ² V ^{- 1} s ^-1和8.9%的超低迁移率可变系数。这项工作为制造高性能有机电子产品的有机单晶晶圆开辟了一条新途径。

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Wafer-Scale Epitaxial Growth of Two-dimensional Organic Semiconductor Single Crystals toward High-Performance Transistors

The success of state-of-the-art electronics and optoelectronics relies heavily on the capability to fabricate semiconductor single-crystal wafers. However, the conventional epitaxial growth strategy for inorganic wafers is invalid for growing organic semiconductor single crystals due to the lack of lattice-matched epitaxial substrates and intricate nucleation behaviors, severely impeding the advancement of organic single-crystal electronics. Here, an anchored crystal-seed epitaxial growth method for wafer-scale growth of 2D organic semiconductor single crystals is developed for the first time. The crystal seed is firmly anchored on the viscous liquid surface, ensuring the steady epitaxial growth of organic single crystals from the crystal seed. The atomically flat liquid surface effectively eliminates the disturbance from substrate defects and greatly enhances the 2D growth of organic crystals. Using this approach, a wafer-scale few-layer bis(triethylsilythynyl)-anthradithphene (Dif-TES-ADT) single crystal is formed, yielding a breakthrough for organic field-effect transistors with a high reliable mobility up to 8.6 cm² V⁻¹ s⁻¹ and an ultralow mobility variable coefficient of 8.9%. This work opens a new avenue to fabricate organic single-crystal wafers for high-performance organic electronics.

更新日期：2023-07-12

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