The stability of two-dimensional transition metal chalcogenides (TMDCs) is important for their reliable device applications in nanoelectronics and optoelectronics. Here, we report the degradation of MoS₂ grown by chemical vapor deposition (CVD) in atmospheric environment. Through high-pressure treatment and water immersion of molybdenum disulfide (MoS₂) samples, we found that moistures will permeate into the interface between MoS₂ and sapphire to accelerate oxidation. Therefore, isolating oxygen and moistures is beneficial to improve the long-term stability of TMDCs. Our study deepens the understanding of MoS₂ degradation process and provides an important basis for the stability improvement of TMDCs.

二维过渡金属硫属元素化物（TMDC）的稳定性对其在纳米电子学和光电子学中的可靠器件应用至关重要。在这里，我们报告了在大气环境中通过化学气相沉积（CVD）生长的MoS ₂的降解。通过高压处理和将二硫化钼（MoS ₂）样品浸入水中，我们发现水分会渗透到MoS ₂和蓝宝石之间的界面中，从而加速氧化。因此，隔离氧气和水分有利于提高TMDC的长期稳定性。我们的研究加深了对MoS ₂降解过程的理解，并为提高TMDCs的稳定性提供了重要依据。