The paper focuses on "Phenomenological modeling for femtosecond laser processing of fused silica", which is published on Journal of Manufacturing Processes.

Highlights

1. A phenomenological model for femtosecond laser ablating fused silica is proposed.

2. The model couples the change in fluence absorption and the incubation effect.

3. Multi-pulse ablation for processing micro grooves and 3D structures is simulated.

4. The predicted sectional profiles show good agreements with experimental data.

5. The laser fluence has strong correlation with the shape of ablation profile.