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个人简介

教育经历 2004.92007.6河北师范大学材料物理与化学硕士 2007.92010.6大连理工大学等离子体物理博士 2000.92001.6河北师范大学物理学学士 工作经历 2013.1至今大连理工大学 2010.82012.12比利时安特卫普大学博士后

研究领域

具有自主知识产权的大型源代码的编写和调试 COMSOL多物理场耦合和PEGSUS低温等离子体模拟商业软件的使用 低气压射频等离子体源背景气体和中性基团的输运机制 低气压射频容性和感性耦合放电的流体动力学模型研究 碳氟等离子体源的放电特性和硅材料的刻蚀机理 射频感性耦合等离子体放电模式转化机理的混合模拟研究 氮气直流平板和空心阴极辉光放电特性的PIC/MCC模拟研究 低温等离子体源的多物理场数值仿真技术

近期论文

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Lian-Zhu Zhang*, Shu-Xia Zhao, Xiu-Lan Meng, “Characterization of nitrogen glow discharge plasma via optical emission spectrum simulation”, Plasma Sci. and Tech., 10, 455 (2008). Shu-Xia Zhao and Lian-Zhu Zhang*, "PIC/MCC simulation of nitrogen glow discharge plasma process", Nuclear fusioni and plasma Physics, 29, 39-43 (2009). (in Chinese) Shu-Xia Zhao, Xiang Xu, Xue-Chun Li and You-Nian Wang*, "Fluid simulation of the E-H mode transition in inductively coupled plasma", J. Appl. Phys. 105, 083306 (2009). Shu-Xia Zhao, Fei Gao and You-Nian Wang*, "Dynamic investigation of mode transition in inductively coupled plasma with a hybrid model", J. Phys. D: Appl. Phys. 42, 225203 (2009). Fei Gao, Shu-Xia Zhao and You-Nian Wang*, "Comparison between experiment and simulation for Ar inductively coupled plasma", Phys. Plasmas 16, 113502, (2009). Wei Jiang, Hong-Yu Wang, Shu-Xia Zhao, and You-Nian Wang*, "Hysteresis induced by gap length effects in CCP at low pressure", J. Phys. D: Appl. Phys., 42, 102005 (2009) Shu-Xia Zhao, and You-Nian Wang*, "Investigation of the effect of metastable atoms on mode transition in argon inductive discharge via a hybrid model ", J. Phys. D: Appl. Phys. 43, 275203 (2010). Fei Gao, Shu-Xia Zhao, Xiao-Song Li and You-Nian Wang*, "Effects of matching network on the hysteresis during E and H mode transitions in argon inductively coupled plasma ", Phys. Plasmas 17, 103507 (2010). Yu-Ru Zhang, Xiang Xu, Shu-Xia Zhao, Annemie Bogaerts, and You-Nian Wang*, "Comparison of electrostatic and electromagnetic simulations for very high frequency plasma", Phys. Plasmas, 17, 113512 (2010). Xiang Xu, Shu-Xia Zhao, Yu-Ru Zhang, and You-Nian Wang*, "Phase-shift effect in capacitively coupled plasmas with two radio frequency or very high frequency sources", J. Appl. Phys., 108, 043308 (2010). Xue-Jiao Si, Shu-Xia Zhao, Xiang Xu, Annemie Bogaerts and You-Nian Wang*, "Fluid simulations of frequency effects on nonlinear harmonics in inductively coupled plasma", Phys. Plasmas, 18, 033504 (2011). Shu-Xia Zhao*, Fei Gao, You-Nian Wang and Annemie Bogaerts, "The effects of F2 attachment by low-energy electrons on the electron behavior in an Ar/CF4 inductively coupled plasma", Plasma Sources Sci. Technol. 21, 025008 (2012). Quan-Zhi Zhang, Shu-Xia Zhao, Wei Jiang, and You-Nian Wang*, "Separate control between geometrical and electrical asymmetry effects in capacitively coupled plasmas", J. Phys. D: Appl. Phys., 45, 305203 (2012). Fei Gao, Xue-Chun Li, Shu-Xia Zhao, and You-Nian Wang*, "Spatial variation behaviors of argon inductively coupled plasma during discharge mode transition", Chin. Phys. B, 21(7), 075203 (2012). Shu-Xia Zhao*, Fei Gao, You-Nian Wang and Annemie Bogaerts, "Gas ratio effects on the Si etch rate and profile uniformity in an Ar/CF4 inductively coupled plasma", Plasma Sources Sci. Technol. 22, 015017 (2013). Wei Liu, Fei Gao, Shu-Xia Zhao, Xue-Chun Li, and You-Nian Wang*, "Mode transitioin in CF4+Ar inductively coupled plasma", Phys. Plasmas, 20, 123513 (2013). Fei Gao, Wei Liu, Shu-Xia Zhao, Yu-Ru Zhang, Chang-Sen Sun, and You-Nian Wang*, "Changes of the electron dynamics in hydrogen inductively coupled plasma", Chin. Phys. B, 22(11), 115205 (2013). Fei Gao, Yu-Ru Zhang, Shu-Xia Zhao, and You-Nian Wang*, "Experimental ad numerical investigations of the phase-shift effect in capacitively coupled discharges", Phys. Plasmas, 21, 083507 (2014). Shu-Xia Zhao*, Yu-Ru Zhang, Fei Gao, You-Nian Wang and Annemie Bogaerts, "Bulk plasma fragmentation in C4F8 inductively coupled plasma: a hybrid modeling study", J. Appl. Phys., 117(24), 243303 (2015). Shu-Xia Zhao*, Fei Gao, Ya-Ping Wang, You-Nian Wang and Annemie Bogaerts, "Effects of feedstock availability on the negative ion behavior in a C4F8 inductively coupled plasma", J. Appl. Phys., 118(3), 033301 (2015). Hui-Jing Xu,Shu-Xia Zhao*, Yu-Ru Zhang, Fei Gao, Xue-Chun Li, You-Nian Wang, "Equivalent circuit effects on mode transitions in H2 inductively coupled plasmas",Phys. Plasma, 22, 043508, (2015). Hui-Jing Xu, Shu-Xia Zhao*, Fei Gao, Yu-Ru Zhang, Xue-Chun Li, You-Nian Wang, "Discontinuity of mode transition and hysteresis in hydrogen inductively coupled plasma via a fluid model", Chin. Phys. B, 24(11), 115201,(2015). Wei, Liu, De-Qi Wen, Shu-Xia Zhao, Fei Gao, and You-Nian Wang*, "Characterization of O2 /Ar inductively coupled plasma studied by using a Langmuir probe and global model", Plasma Sources Sci. Technol. 24, 025035 (2015). Liang Yang, Hui-Jie Yan, Xiao-Hua Qi, Shu-Xia Zhao, and Chun-Sheng Ren*, "Geometry Effects of SDBD Actuator on Atmospheric-Pressure Discharge Plasma Airflow Acceleration", IEEE Trans. Plasma Sci., 43(10), 3653 (2015). Wei Yang, Shu-Xia Zhao, De-Qi Wen, Wei Liu, Yong-Xin Liu, Xue-Chun Li, and You-Nian Wang*, "F-atoms kinetics in SF6/Ar inductively coupled plasma", J. Vac. Sci. Technol. A, 34(3), 031305 (2016). Xi-Feng Wang, Yuan-Hong Song*, Shu-Xia Zhao, Zhong-Ling Dai, and You-Nian Wang, "Hybrid Simulation of Duty Cycle Influences on Pulse Modulated RF SiH4/Ar Discharge", Plasma Sci. Technol., 18(1), 1 (2016). Shu-Xia Zhao* and Zhao Feng, "Gas flow characteristics of argon inductively coupled plasma and advections of plasma species under incompressible and compressible flows", Chin. Phys. B, 27(12), 124701 (2018). Shu-Xia Zhao*, "Non-monotonic behavior of electron temperature in argon inductively coupled plasma and its analysis via novel electron mean energy equation", Phys. Plasmas, 25, 033516 (2018). Shu-Xia Zha*, "Mode transition and hysteresis in inductively coupled plasma sources", Chap. 6 in the book of Plasma Science and Technology-Basic fundamentals and modern applications, Published by the IntechOpen limited, editted by Haikel Jelassi and Djamel Benredjem, 2019. (P. 89) Shu-xia Zhao*, "Quasi-delta negative ions density of Ar/O2 inductively coupled plasma at very ow electronegativity", Chin. Phys. B, 30(5), 055201 (2021). Shu-Xia Zhao* and Jing-Ze Li, "Delta distribution of electronegative plasma predicted by reformed spring oscillator dynamic equation with dispersing force", Chin. Phys. B, 30(5), 055202 (2021). Wen-Hua Wang, Shu-Xia Zhao*, and Zhong-Ling Dai, "A self-consistent method for solving ion diffusion and mobility coefficients", Phys. Plasmas, 28, 103503 (2021). Wen-Hua Wang, Shu-Xia Zhao*, and Zhong-Ling Dai, "The impact of ion mobility coefficients on plasma discharge characteristics", Phys. Plasmas, 29, 073501 (2022). Xiang-Mei Liu*, Xiao-Tian Dong, Hong-Ying Li, and Shu-Xia Zhao*, "The effects of dilution gas on nanoparticle growth in atmospheric-pressure acetylene microdischarges", Plasma Sci. Technol., 24, 105503 (2022). Xiang-Mei Liu*, Wen-Jing Liu, Xi Zhang, Xiao-Tian Dong, and Shu-Xia Zhao*, "Effect of gas flow on the nanoparticles transport in dusty acetylene plasmas", Plasma Sci. Technol., 25, 105401 (2023). Shu-Xia Zhao*, "Thinking about the wave-partice durality with plasma theory and explaining it based on the oscillator and qseudo-oscillator models", Global Journal of Science Frontier Research A, 23(5), 71 (2023). (Open access)

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