崔峰 - 上海交通大学 - 微纳电子学系

个人简介

1995.9-1999.7 长春理工大学机械设计专业大学本科/学士1999.9-2002.3 长春理工大学机械制造及其自动化专业研究生/硕士2002.3-2007.4 上海交通大学微电子学与固体电子学专业研究生/博士2007.4-2011.12 上海交通大学微纳科学技术研究院助理研究员 2012.1至今上海交通大学微纳科学技术研究院副研究员

研究领域

研究方向包括微机电系统（MEMS）的设计、微制造及集成，目前主要从事悬浮式微陀螺/加速度计、固体振子微陀螺、高G微加速度计、高速飞行体速度传感器、PCR芯片等MEMS器件的研究。

近期论文

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Cui F, Chen WY, Zhao XL, et al. Metal foundation construction to consolidate electroplated structures for successful removal of SU-8 mould. Electronics Letters, 2006, Vol.42,pp690-691. Feng Cui, Wenyuan Chen, Weiping Zhang, et al. Design and Fabrication of an Electrostatically Suspended Microgyroscope using UV-LIGA Technology. Microsystem Technologies, 2009, Vol. 15(12), pp1885–1896. F. Cui, W. Liu, W.-Y. Chen, W.-P. Zhang and X.-S. Wu. Hybrid microfabrication and 5-DOF levitation of micromachined electrostatically suspended gyroscope. Electronics Letters, 2011,Vol.47( 17), pp.976-978 Feng Cui, Wu Liu, Wenyuan Chen, Weiping Zhang and Xiaosheng Wu. Design, Fabrication and Levitation Experiment of a Micromachined Electrostatically Suspended Six-axis Accelerometer. Sensors, 2011, Vol.11, no12, pp 11206-11234. D D Shao, F Cui*, W Y Chen, and W P Zhang. Investigation on removal of SU-8 electroplating mould using fuming sulphuric acid. Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science, 2011，vol. 225 no. 9, pp 2277-2282. Feng Cui, Wenyuan Chen, Weiping Zhang, Zhenni Qin, Gaoyin Ma, Qijun Xiao, Xiaosheng Wu, and Wu Liu. Optimization Design of an Electrostatically Suspended Microgyroscope. 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Xiamen, China, Jan. 20-23, 2010. Z. Wan, F. Cui*, Y.K. Zhang, W. Liu, W.Y. Chen and W.P. Zhang. Design of Proof Mass and System-level Simulation of a Micromachined Electrostatically Suspended Accelerometer. Advanced Materials Research, 2011,Vols. 317-319, pp 1631-1634. Yunkui Zhang, Feng Cui*, Zhen Wan, Kai Li, Wu Liu, Weiping Zhang. A High–G Metal Capacitive Microaccelerometer with Round Proof Mass Supported by Multi-Beam. Advanced Materials Research, 2011,Vols. 317-319, pp 1843-1846 Lei Yang, Feng Cui*, Wu Liu, Xiaosheng Wu, Weiping Zhang, Wenyuan Chen. Modal FEM analysis using weak form equations for a microgyroscope with bulk giant magnetostrictive material (GMM) resonator. Advanced Materials Research, v 650, p 513-517, 2013.