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男,1971年5月生于内蒙乌兰浩特市。1999年3月于哈尔滨工业大学航天学院获得博士学位。 1999.03-2000.10中科院上海小卫星工程部总体主管设计师 2000.11-2002.10新加坡南洋理工大学微系统力学中心研究员(ResearchFellow) 2002.08-2004.08荷兰先进半导体设备(ASM)集团亚太研究中心SnrInstrumentationEngineering 2004.08-2008.12国家光刻设备研究中心暨上海微电子装备有限公司高工/总体系统设计师/技术委员会委员 2014.02-2014.09澳大利亚伍伦贡大学(UoW)高级访问教授 2009.02-现在中国计量大学机电工程学院教授副院长 2017.11-现在上海大学机械与自动化学院博士生导师 ------------------------------------------------------------- 主要从事高速高精机器与复杂设备系统的动力学建模与优化、结构工程及振动控制等方面的研究。在实际工作中,已陆续参加和主持了国内外(科技部、中国航天科技集团,中科院重大知识创新、新加坡政府、世界第一大半导体封装设备供应商ASM亚太研究中心,上海微电子装备有限公司等),某大型叉车的模态分析、测试、振动传递机理及动力学优化等多项大型高新项目的研究,参加和承担过国家十五与863重大专项,承担2项有关的重大专项的子项目,如水下无人巡航机器人、后道微电子封装设备(如引线键合机、注塑封装机等)、前道制造设备(100nm光刻机)的研究工作,在业内从事超精密半导体制造设备研制工作多年,攻克了许多技术难关。2009年以来与中国海洋大学水下机器人项目组合作,担任合作教授,已积累较多的工程经验,发表高水平的学术论文60余篇,其中SCI收录近30余篇(其中第一作者20余篇),申请了近60项发明专利,其中近30余项业已授权,多次受邀参加国内外举办的高水平的学术会议,并受邀为国际有影响的学术杂志,如IEEETransactionsonMagnetics、IEEETransactionsonControlSystemTechnology与IEEETransactionsonAutomationScienceandEngineering,IEEETransonIndustrialElectronics等多种知名杂志之特约审稿人等。于2006年8月获上海浦江人才计划资助的项目“双轴驱动高速高精工件台研制”(A类),在2008年8月获评“出色地”完成;2008年1月曾荣获教育部自然科学奖一等奖(第二完成人)等多个项目奖。 在研课题 [1]2010年6月获批浙江省“杰出青年”基金资助; [2]2010年9月“高速超精系统的耦合动力学建模与误差补偿模型研究”获批国家自然科学基金资助(2011.1-2013.12; [3]2010年11月,获得流体动力与机电系统国家重点实验室开放基金资助; [4]2011年01月,获得数字制造与装备技术国家重点实验室开放基金资助; [5]2011.03某大型叉车的振动传递及模态分析测试及动力学优化; [6]2013.03某大型的护顶架焊接变形分析与预测及关键控制参数研究. [7]2013.09“水下机器人水动力学建模优化与路径最优生成”获得获批国家自然科学基金资助(2014.1-2017.12),80万; [8]2014.01主持产学研项目:自主搬运装备的研制 [9]2016.06获得2016国家重点研发计划项目“深海关键技术”---水下机器人AUV平台设计与优化 等 获奖情况 【1】2006年1月被上海微电子装备有限公司评为“先进员工”; 【2】2006年8月获得上海“浦江人才计划”(A类资助),于2008年8月获评“出色地”完成了任务;(★) 【3】2008年1月,主持的863重大专项子项目“光刻机机电联合仿真与虚拟试验台”被评为优秀科技成果奖; 【4】2008年1月,主持的863重大专项子项目“超精密主动减振控制与智能诊断平台”被评为优秀科技成果奖; 【5】2008年1月获得教育部“自然科学奖”(一等奖)一项;(★) 【6】2010年01月,获得浙江省新世纪151人才工程资助(第三层次)。(★) 【7】2011年01月,获得浙江省新世纪151人才工程资助(第二层次)。(★) 【8】2011年01月,获评校“先进科技工作者”; 【9】2011年01月,获评校“优秀班主任”;等

研究领域

装备制造与控制动力学分析与优化,模态分析与测试振动与噪声控制精密机电系统与伺服控制

近期论文

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2013至2014年发表的期刊论文与会议论文:  【1】T.H. Yan*, B.He, X.D. Chen, X.S.Xu, 2013. Discrete-Time Sliding Mode Control With Computation Time Delay And RRO Compensation For Hard Disk Drives. Mathematical Problems in Engineering, An International Journal. Vol.2013, PaperID,2013 (SCI,IF=0.777).  【2】B.He, B.R.Wang, T.H.Yan*, Y.Y. Han, 2013. A Distributed Parallel Motion Control for the Multi-thruster Autonomous Underwater Vehicle, Mechanics Based Design on Structures and Machines, An International Journal. Vol.42(2):236-257,2013(SCI,EI). 【3】B.Han, B.He, M.M. Ma, T.T. Sun, T.H.Yan*, A.Lendasse,2014, “RMSE-ELM: Recursive Model Based Selective Ensemble of Extreme Learning Machines for Robustness Improvement,” Mathematical Problems in Engineering, vol.2014, Article ID 395686,12pages,2014.doi:10.1155/2014/395686(SCI,EI) 【4】Y.Liu, B.He, D.Y.Dong, Y.Shen, T.H.Yan*, R.Nian, A.Lendasse,2014, “Particle Swarm Optimization Based Selective Ensemble of Online Sequential Extreme Learning Machine,” Mathematical Problems in Engineering, vol.2014, Article ID 504120,11pages,2014. doi:10.1155/2014/504120(SCI,EI) 【5】Sumei Pi; Bo He; Shujing Zhang; Rui Nian; Yue Shen; Tianhong Yan*,2014, Stereo visual SLAM system in underwater environment, Oceans2014–TAIPEI,DOI: 10.1109,Page(s):1-5 【6】S.J.Zhang; Bo He; R.Nian; Y.Liang; T.H.Yan*, 2013, SLAM and a novel loop closure detection for autonomous underwater vehicles.Oceans-San Diego,2013, Page(s):1-4 【7】Bo He; Xiaoyan Jiang; Rui Nian; Tianhong Yan, 2013, Rao-blackwellised particle filter SLAM with consistent mapping for AUVs, Oceans-San Diego,2013,Page(s):1-3 【8】Sun,Na; Nian,Rui; He,Bo; Yan,Tianhong, 2014, Consistent fish tracking via multiple underwater cameras, Oceans2014-TAIPEI, DOI: 10.1109/OCEANS-TAIPEI.2014.6964366,Page(s):1-5 【9】Ying,Lulu; He,Bo; Zhang,Shujing; Nian,Rui; Shen,Yue; Yan,Tianhong, 2014, Efficient implementation of incremental smoothing and mapping based on fluid variable reordering for AUVs, Oceans 2014-TAIPEI, DOI: 10.1109/OCEANS-TAIPEI.2014.6964383, Page(s):1-5 【10】Wang,Jing; He,Bo; Zhang,Shujing; Nian,Rui; Shen,Yue; Yan,Tianhong, 2014, An efficient digital image compression scheme based on ICA for underwater color images, Oceans 2014-TAIPEI, DOI:10.1109, Page(s): 1-4.  【11】Ying,Lulu; He,Bo; Zhang,Shujing; Nian,Rui; Shen,Yue; Yan,Tianhong, 2014, A modified FastSLAM with simple particle swarm optimization and consistent mapping for AUVs, Oceans 2014-TAIPEI, DOI: 10.1109, Page(s):1-5. 以前发表的主要论文(标*为通信作者) 【12】T.H.Yan*, X.S. Xu, J.Q. Han, et al, 2011. Optimization of Sensing and Feedback Control for Vibration/Flutter of Rotating Disk by PZT Actuators via Air Coupled Pressure. Sensors. 2011; 11(3):3094-3116.(SCI,IF=1.774) 【13】X.S.Xu, T.H.Yan*, X.Z.Tao, T.R. Zhu, D.Li, 2012, Generating NC Program based on Template for Mass Customization Product, Assembly Automation, Vol.32(3): .(SCI, IF=0.645) 【14】J.Q.Han, X.F.Wang, T.H.Yan, X.B.Song, et al. 2012, A Novel Method of Temperature Compensation For Piezoresistive Microcantilever-Based Sensors, Review of Scientific Instruments, 83(3):035002/1~6 (SCI, IF=1.598) 【15】B.He, S.J.Zhang, T.H.Yan*, Tao Zhang, Y. Liang, H.J. Zhang, 2011. A Novel Combined SLAM Based on RBPF-SLAM and EIF-SLAM for Mobile System Sensing in a Large Scale Environment, Sensors, Vol.11(3), pp.10197-10219. (SCI,IF=1.774) 【16】B.He, H.J.Zhang,C.Li, S.J.Zhang, Y.Liang, T.H.Yan*. 2011. Autonomous Navigation for Autonomous Underwater Vehicles Based on Information Filters and Active Sensing. Sensors. Vol.11(11):10958-10980 (SCI,IF) 【17】T.H.Yan, H.Y.Pu, X.D.Chen, Q.Li, C.Xu, 2010, Integrated Hybrid Vibration Isolator with Feedforward Compensation for Fast High-Precision Positioning X/Y Tables. IOP Journal of Measurement Science and Technology. 2010; Vol. 21(6): 065901-065910. (SCI, EI) 【18】T.H.Yan, et al, 2010, The Discrete-time Sliding Mode Control for High-Precision Stages of Micro-Electronics Equipments, Control Engineering (Chinese Journal), Vol. 17(4): 430-435. 【19】T.H.Yan, H.Y.Pu, Q.Li, C. Xu, X. D. Chen, 2010, Dynamic Absorber Design for Actuator Arm of Hard Disk Drives on Impact Resist Improvement. Mechanics Based Design on Structures and Machines, An International Journal. Vol.38 (1): 50-73 (SCI, EI).  【20】J.Lei, X.Luo, X.D. Chen, T.H.Yan, 2010, Modeling And Analysis of A 3-DOF Lorentz-Force-Driven Planar Motion Stage For Nanopositioning, Mechatronics, Vol.20(5), pp.553–565, 2010 ( SCI, EI) 【21】T.H.Yan, C.Xu, Q.Li, X.D. Chen, 2010, Experimental Study on Multisensing Control with Vibration Control for High-Precision X/Y Stages, The 10th WSEAS International Conference on ROBOTICS, CONTROL and MANUFACTURING TECHNOLOGY (ROCOM '10), Hangzhou, China. 【22】T.H.Yan, W.Wang, X.D.Chen, Q.Li, C.Xu, 2009, Design of a Smart Ultrasonic Transducer for Interconnecting Machine Applications. Sensors. 2009; 9(6):4986-5000. (SCI, EI) 【23】T.H.Yan, X.D.Chen, R.M.Lin, 2008, “Servo System Modeling and Reduction of Mechatronic System Through Finite Element Analysis for Control Design”, Mechatronics, Vol.18 (9):466-474, 2008. (SCI, EI) 【24】T.H.Yan, X.D.Chen, W.F.Dou, R.M.Lin, 2008,  “Feedback Control of Disk Vibration and Flutter by Distributed Self-Sensing Actuators”. Mechanics of Structures and Machines, An International Journal. 36(3): 1-23, 2008 (SCI, EI) 【25】T.H.Yan, X.D.Chen, R.M.Lin, 2007, “Vibration Interaction Characteristics of Disks-Spindle in Hard Disk Drives”. An International Journal for Mechanics Based Design of Structures & Machines. Vol.35 (1): 97–112, 2007. (SCI, EI)  【26】T.H.Yan, R.M.Lin, 2006, “General Optimization of Sizes or Placement For Various Sensors/Actuators in Structure Testing and Control”. IOP Journal of Smart Material and Structures. Vol. 15(1), 2006. (SCI, EI) 【27】T.H.Yan, G.W.Zhang, R.M.He, 2006, “New Progresses on Dynamics, Vibration & Control.” (Book in Chinese) Chapter: Integrated Hybrid Vibration Isolating Technology for High-Precision Semiconductor Equipments.” Beijing: China National Astronautics Press, July 2006. (PDF) 【28】T.H.Yan, W.Chen, 2005, “Quasi-Rigid Mode of Bond Head Assembly in Wire Bonding Machines and its Improvement”. An International Journal for Mechanics Based Design of Structures & Machines. Vol.33 (4) 2005. (SCI, EI)  【29】T.H.Yan, R.M.Lin, 2004, “Dual-Mass Absorber for the Head Actuator Assembly of Hard Disk Drives”. An International Journal for Mechanics Based Design of Structures & Machines. Vol. 32(2), 2004. (SCI, EI) 【30】T.H.Yan, R.M. Lin, 2003, ”Experimental Investigation on Pivot Nonlinearity and Accurate Compensation for Servo Control in Hard Disk Drive.” IEEE Transactions of Magnetics. Vol.39(2), March 2003.(SCI, EI) 【31】T.H.Yan, R.M.Lin, 2004, “Vibration Characteristics of Disks-Spindle System Interaction In Hard Disks.”IEEE/ASME Asia-Pacific Magnetic Recording Conference Korea, 2004. 【32】T.H.Yan, R.M.Lin, 2002, "Finite Element Modeling and Modal Testing of Vibration Characteristics of Disk Drives.” International Modal Analysis Conference (IMAC)-XX, Los Angeles, California USA, Feb.4-7, 2002. 【33】T.H.Yan, R.M.Lin, 2002, "Servo system modeling and Reduction for Hard Disk Drives through Finite Element Method.” ASME 13th International Symposiums for Information Storage and Processing System, Santa Clara, California USA, Jun.17-18, 2002. 【34】T.H.Yan, R.M.Lin, 2002,  “Discrete-Time Sliding Mode Control With Computation Time Delay And RRO Compensation For Hard Disk Drives.” IEEE/ASME Asia-Pacific Magnetic Recording Conference 2002, Singapore, Aug. 26-28, 2002. 【35】T.H.Yan, R.M.Lin, 2002, “Discrete-Time Sliding Mode Repetitive Control for Track-Following System of An Optical Disk Drives.” IEEE/ASME Asia-Pacific Magnetic Recording Conference 2002, Singapore, Aug. 26-28, 2002. 【36】T.H.Yan, R.M.Lin, 2002, “Feedback Control of Disk Vibration and Flutter by Distributed Self-Sensing Actuators.” IEEE/ASME Asia-Pacific Magnetic Recording Conference 2002, Singapore, Aug. 26-28, 2002. 【37】R.M. Lin, Y.Y. Wang, T.H.Yan, J.Y.Zhou, 2001, “Compensation for Mechanical Resonance in Head Actuator Assembly of Hard Disk Drives by Multi-Sensing Control.”  Technical Report for Industry Project (SONY Singapore Resaerch Lab). Oct. 2001. Totally 104 pages.  ------------------------------------------------------------------------------ ******Some Papers Published During Tutoring the Master/PhD Candidates*****: ------------------------------------------------------------------------------ 【38】X.D.Chen,X.Z.Yu, X.M.He, T.H.Yan et al. 2008, Dynamic characteristic analysis of precision long stroke linear motor with air-bearing in optical lithography. Chinese Journal of Mechanical Engineering(English Edition). Vol.21 (2), 2008. 【39】X.D.Chen,H.Z. Guo, T.H.Yan,X.Z.Yu. 2007, The dynamics characteristic and optimization of the Main Plate of Lithography Equipment. Mechanical Engineering of China (In Chinese). Vol.18(21), 2007.  【40】Y. Sun, X.D.Chen, T.H.Yan, W.C.Jia, 2006, Modules Design of a Reconfigurable Multi-Legged Walking Robot, IEEE International Conference on Robotics and Biomimetics, 2006. ROBIO'06. On page(s): 1444-1449, ISBN: 1-4244-0570-X 【41】W.C.Jia, X.D. Chen, T.H.Yan, Y.Sun, M.H.Zhou, 2006, Biological Modeling Control of a Multilegged Walking Robot, IEEE/RSJ International Conference on Intelligent Robots and Systems, 2006, On page(s): 5737-5742, ISBN: 1-4244-0259-X. 【42】X.D.Chen, W.Jiang, T.H.Yan, 2008, “Symbolic Formulation of Linearized ODEs via Matrix Transformation for Vibration Analysis of Multibody Systems” Chinese Journal of Mechanical Engineering. Vol44(6), June 2008. 【43】T.J. Li, T.H.Yan, X.F.Zhang, 2007, Dynamic Analysis And Simulation of A Spherical Omni-directional Rolling Robot, Journal of Xidian University, Vol.34, No.3: 414 ~ 417,471, 2007.  【44】T.J.Li, F.J.Wang, T.H.Yan, 2008, Case-based Reasoning Method for Fault Recovery with Expanded Similarity Space, Journal of Xidian University (Natural Science), Vol.35(3):499-503, June 2008. 【45】S. Y. Zhang, X. D. Chen, H. Zhao, T.H. Yan, 2008, Motion Control of a Precise Wafer Stage, Chinese Journal of Mechanical Engineering, Vol.19, No.12: 1474-1479. June 2008.  【46】T.J.Li, T.H.Yan etc, 2007, Dynamic Modeling and Simulation of Spherical Omnidirectional Rolling Robot, Journal of System Simulation, Vol.19, No.18:4239 ~ 4242, 2007. 【47】S. Y. Zhang, X. D. Chen, H. Zhao, T.H.Yan, 2008. Motion Control of Super Precision Stage, Journal of Huazhong University of Science & Technology, Vol.36 (10): 37-40. June 2008.  【48】X. S. Xu, X. Cheng, T. H. Yan, 2011, Methods on Parameter Calibration and Tolerance Identification of Master Product Variant Model. Journal of Mechanical Engineering (Chinese), Vol.47(1): 132-137, Jan 2011.…… 等等 ********************************************** 申请的专利(包括第二作者及以后):     发明专利 (34)项:(近4年内发明授权19项) ********************************************** 【01】200710173581.9  一种剪式提升装置 【02】200710172427.X  一种工件台平衡质量定位系统(2011-6-15授权) 【03】200710172429.9  工件台平衡质量定位系统 【04】200710173146.6  单孔形标记对准信号处理方法 【05】200710173575.3  光刻设备的探测装置与探测方法 【06】200810033058.0  一种抓手角度可调的夹取装置 【07】200710172938.1  基于自适应纠正处理提高对准信号处理精度的方法(2009.11.11授权) 【08】200710045581.0  一种精密提升装置 【09】200510026019.4  一种精密减振和定位装置  【10】200510029686.8  一种随机响应信号测量与分析的方法 【11】200510112113.1  一种精密定位和调整工装(2009.6.24授权)  【12】200610025895.X  一种复合减振式光刻装置(2009.3.11授权) 【13】200610147842.5  悬挂式支撑成像系统及光刻装置 【14】200710040650.9  一种传输控制装置及其控制方法(2010.6.9授权)  【15】200710040997.3  一种多链接传输控制方法 【16】200710041769.8  一种旋转交换的双台系统(2009.6.24授权)  【17】200710042417.4  光刻机工件台平衡定位系统(2009.5.27授权) 【18】200710043324.3  垂向微调及重力补偿装置与光刻机(2010.1.6授权) 【19】200710041226.6  光刻机工件台平衡定位系统(2009.8.12授权) 【20】200710044559.4  光刻装置的对准方法及系统(2009.8.12授权) 【21】200710044848.4  脉冲信号的逼近方法 (2009.6.24授权) 【22】200710046060.7  气缸活塞减振装置(2009.6.24授权) 【23】200810036911.4  二维编码归一化对准标记组合及其对准方法和对准系统(2011.5.11授权) 【24】200810036910.X  归一化对准标记组合及其对准方法和对准系统(2011.5.11授权) 【25】200810038391.0  光刻设备的探测装置、探测方法及制造方法(2010.6.2授权) 【26】200810037649.5  六自由度微动台(2010.6.9授权) 【27】200810200646.9  脉冲波强度采样同步的校准方法与系统  【28】200810200919.X  主动减振系统及其预见控制方法(2010.10.27授权) 【29】200810200647.3  信道增益数字均衡自适应校准系统与方法(2011.11.30授权) 【30】200810201311.9  主动减振隔振装置及主动减振隔振系统(2010.6.9授权) 【31】200810200917.0  一种同轴度检测装置 【32】200910045207.X  一种减振支撑装置 【33】200780050936.3  可逆极性解码器电路及相关方法 【34】201010121928.7 一种活塞往复式压缩机“无余隙”机型的分体型吸气阀体及安装方法 实用新型专利 (7)项: 【35】200720074739.2    活塞气缸减振机构 【36】200720076163.3    垂向微调及重力补偿机构 【37】200620041223.3    一种可以转出的带有记忆功能的六自由度精密调节装置 【38】200620049444.5    一种柔性支撑机构 【39】200720067425.X    一种大阻尼精密柔性支撑机构 【40】200720076162.9    一种工件台平衡定位装置 【41】200720076166.7    一种精密提升装置 带领课题组共申请专利近百项,其中50余项发明专利,30余项发明专利业已授权。

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